Title: Etch Rate Prediction for Ion Milling Machines
Type: ReportReport
Participant(s):
Author:  Hjorth, Poul G. (Cwisno: 901)
Technical University of Denmark
Email:

Forfatter:  Dellar, Paul
Department of Mathematics, Imperial College London, London SW7 2AZ, UK

Forfatter:  Bohun, Chris
Department of Mathematics, University of Ontario Institute of Technology, Ontario L1H 7K4, Canada

Forfatter:  Ockendon, John
OCIAM, Mathematical Institute, 24-29 St. Giles’, Oxford OX1 3LB, UK.

Published:
See the publication in DTU Orbit See the publication in DTU Orbit